Micro-Opto-Mechanical Pressure, Sound, and Ultrasound Sensors in Silicon-Nitride Photonic Technology

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Abstract

Micro-electro-mechanical systems (MEMS) are used in applications ranging from consumer electronics to medical diagnostics. Alternatively, optical sensors offer low-noise, remote read-out via optical fiber, and are insensitive to electromagnetic interference. We demonstrate micro-opto-mechanical sensors (MOMS) in siliconnitride photonic technology. Experimental results and design trade-offs of pressure, sound, and ultrasound sensors are reported. Transparency for visible light offers prospective applications in life sciences, such as photo-acoustics.