A study of the CMP effect on the quality of thin silicon films crystallized by using the ¿-Czochralski process

Derakhshandeh, J; Tajari Mofrad, M.R.; Ishihara, R; van der Cingel, J.; Beenakker, C.I.M.

A study of the CMP effect on the quality of thin silicon films crystallized by using the ¿-Czochralski process

Journal article (2009)

Authors

J Derakhshandeh External organisation

M.R. Tajari Mofrad Electronic Components, Technology and Materials

R Ishihara Electronic Components, Technology and Materials

J. van der Cingel Electronic Components, Technology and Materials

C.I.M. Beenakker Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2009

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Research Group

Electronic Components, Technology and Materials

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