Commercial SOI sensor technology

Conference paper (2010)

Authors

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W.J. Westerveld Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , TNO
P. Bodis TNO
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2010 E. van Zeijl, R. Schmits, J. H. van den Berg, P. J. Harmsma, W.J. Westerveld, M. Lagioia, P. Bodis, R. P. Ebeling, R. A. Nieuwland, S. Yang, More Authors
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

We present a platform for the deployment of SOI based sensors in commercial
applications. The platform is designed from a systems perspective and includes all
aspects of a SOI sensor system, including sensor head itself, the communications
infrastructure and a customized interrogation system.