Bulk-micromachined tunable Fabry-Perot microinterferometer for the visible spectral range

Journal article (1999)

Authors

JHG Correia External organisation
M. Bartek Old - EWI Ch. Integrated Sensing Devices
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

1999

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices