Integrated virtual impactor enabled PM2.5 sensor

Journal article (2017)

Authors

M. Dong Electronic Components, Technology and Materials - EEMCS
E. Iervolino Peking University, Guangdong Dongguan Quality Supervision Testing Center
F. Santagata Guangdong Dongguan Quality Supervision Testing Center, Peking University
Guoyi Zhang Peking University
G. Zhang Signal Processing Systems - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2017

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

As more and more proofs show that fine particles (diameter of 2.5μm and below) pose more risk on human health than coarse particles, an increasing need for monitoring fine particles has emerged. A miniaturized sensor designed for measuring fine particle concentration is presented in this paper. The proposed sensor possesses a compact size of only 15 mm × 10mm × 1mm. A virtual impactor has been integrated as a particle size selector and the design is optimized by simulation-assisted analysis. The sensor is realized by silicon microfabrication and wafer-level packaging. Testing results show that a high measurement accuracy of 2.55 μg/m3 has been achieved.

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