Waveguide-Based Multi-Band Mid-IR Absorption Spectroscopy on Water-Containing Biofuel
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Abstract
Silicon waveguide structures with SiO<inf>2</inf> cladding and tapered on-chip couplers are fabricated on Si wafers for use in water-containing biofuel composition measurement in the 2.4- 2.6 μm respectively 3.5-3.8 μm water and ethanol dominated absorption bands.
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Sensors_2018_SeM2J.2.pdf
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