Low-temperature chemical vapour deposition of titanium nitride

Doctoral thesis (1999)

Authors

JPAM Driessen Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
More Info
expand_more

Published Date

1999

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)