Flexible membrane sensor for opto-mechanical force transducer

Abstract (2016)

Authors

R. Stoute Electronic Components, Technology and Materials - EEMCS
James Muganda External organisation
Steven Beekmans Vrije Universiteit Amsterdam
Davide Iannuzzi Vrije Universiteit Amsterdam
R. Dekker Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2016

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials