Parallel electron-beam-induces deposition using a multi-beam scanning electron microscope

Journal article (2011)

Authors

P.C. Post External organisation
A Mohammadi-Gheidari External organisation
C.W. Hagen ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2011

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics