First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls

Conference paper (2014)

Authors

F. Buja Micro and Nano Engineering
J. Kokorian Micro and Nano Engineering
AV Sumant Argonne National Laboratory
Merlijn van Spengen Micro and Nano Engineering
Department
Precision and Microsystems Engineering
More Info
expand_more

Published Date

2014

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Department

Precision and Microsystems Engineering

No files available

Metadata only record. There are no files for this conference paper.