On the uniformity of pure-boron-layer depositions

Mohammadi, Vahid; de Boer, WD; Scholtes, T.L.M.; Sakic, A.; Heerkens, C.Th.H.; Nanver, L.K.

On the uniformity of pure-boron-layer depositions

Conference paper (2011)

Authors

Vahid Mohammadi Electronic Components, Technology and Materials

WD de Boer External organisation

T.L.M. Scholtes Electronic Components, Technology and Materials

A. Sakic Electronic Components, Technology and Materials

C.Th.H. Heerkens External organisation

L.K. Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2011

Language

English

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Research Group

Electronic Components, Technology and Materials

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