Towards an adaptive minimum variance control scheme for specimen drift compensation in transmission electron microscopes

Tejada Ruiz, A; Vos, P.; den Dekker, A.J.

Towards an adaptive minimum variance control scheme for specimen drift compensation in transmission electron microscopes

Conference paper (2011)

Authors

A Tejada Ruiz Mechatronic Systems Design

P. Vos DISC

A.J. den Dekker Team Michel Verhaegen

Research Group

Mechatronic Systems Design

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Published Date

2011

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Research Group

Mechatronic Systems Design

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