Synthesis of Carbon nanofibers (CNFs) by PECVD using Ni catalyst printed by spark ablation

Conference paper (2022)

Authors

L.N. Sacco Electronic Components, Technology and Materials - EEMCS
H.J. van Ginkel Electronic Components, Technology and Materials - EEMCS
S. Vollebregt Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2022 L.N. Sacco, H.J. van Ginkel, S. Vollebregt
DOI: https://doi.org/10.1109/NANO54668.2022.9928632
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Published Date

2022

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

The precise control of patterned arrays of carbon nanofibers (CNFs) is an issue of interest in a wide range of applications. In the present work, we report the synthesis of CNFs grown by plasma-enhanced CVD (PECVD) from a Ni catalyst patterned via aerosol printing of nanoparticles (NPs) by a spark ablation technique. The printing speeds were adjusted to vary the catalyst density and characterize the CNFs distribution in the pre-patterned lines. Depending on the printing speed, different CNFs distributions are obtained, ranging from dense vertically-aligned CNFs (VACNFs) to sparse individual CNFs.

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