Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system

de Roover, D; Bosgra, O.H.

Synthesis of robust multivariable iterative learning controllers with application to a wafer stage motion system

Journal article (2000)

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D de Roover External organisation

O.H. Bosgra DISC

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DISC

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2000

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Research Group

DISC

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