Single-grain Si TFTs fabricated by liquid-Si and long-pulse excimer-laser

Journal article (2012)

Authors

R. Ishihara Electronic Components, Technology and Materials -

J. Zhang Electronic Components, Technology and Materials -

M. Trifunovic Electronic Components, Technology and Materials -

M. van der Zwan Electronic Components, Technology and Materials -

H Takagishi External organisation

R Kawajiri External organisation

T Shimoda External organisation

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:a1bcffbd-fef3-4c9c-a2fc-3737862505bb

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Published Date

2012

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials