Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices

Wijngaards, DDL; Kong, SH; Bartek, M; Wolfenbuttel, R.F.

Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices

Journal article (2000)

Authors

DDL Wijngaards Electronic Instrumentation

SH Kong Electronic Instrumentation

M Bartek Old - EWI Ch. Integrated Sensing Devices

R.F. Wolfenbuttel Electronic Instrumentation

Research Group

Electronic Instrumentation

To reference this document use:

http://resolver.tudelft.nl/uuid:a16a7fe4-d5ce-4c41-b890-2a604f2fb800

More Info

expand_more

Published Date

2000

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Instrumentation

No files available

Metadata only record. There are no files for this journal article.