Process simulation of laser crystallization and analysis of crystallization process of Si films

Conference paper (2005)

Authors

F Kimura External organisation
R Saito External organisation
S Tsukamoto External organisation
Y Hiroshima External organisation
M Dorfan External organisation
S Inoue External organisation
T Shimoda External organisation
R. Ishihara Electronic Components, Technology and Materials - EEMCS
Y van Aandel External organisation
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2005

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials