Low-pressure chemical vapor deposition of pureB layers on silicon for p+n junction formation

Mok, KRC; Mohammadi, V.; Nanver, L.K.; de Boer, W.B.; Vlooswijk, AHG

Low-pressure chemical vapor deposition of pureB layers on silicon for p+n junction formation

Conference paper (2012)

Authors

KRC Mok External organisation

V. Mohammadi Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

W.B. de Boer Old - EWI Sect. ECTM

AHG Vlooswijk External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2012

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials