Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications

Civale, Y; Nanver, L.K.; Hadley, P; van Zeijl, H.W.; Goudena, E.J.G.; Schellevis, H.

Low-Temperature Solid-Phase Epitaxy of Defect-Free Aluminum p+-doped Silicon for Nanoscale Device Applications

Conference paper (2006)

Authors

Y Civale Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

P Hadley QN/Mol. Electronics & Devices

H.W. van Zeijl Electronic Components, Technology and Materials -

E.J.G. Goudena Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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Published Date

2006

Language

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials