Development and applications of novel optoelectromechanical systems micro-machined in silicon. Part 1. Project overview: 2nd annual report

Report (2000)

Authors

G Vdovin External organisation
Affiliation
Delft University of Technology
More Info
expand_more

Published Date

2000

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Affiliation

Delft University of Technology