Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects

Conference paper (2004)

Authors

DHB Wicaksono Electronic Instrumentation
G Pandraud Electronic Instrumentation
JFV Vincent External organisation
P. J. French Electronic Instrumentation
Research Group
Electronic Instrumentation
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Published Date

2004

Language

Undefined/Unknown

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Research Group

Electronic Instrumentation