Growth mechanisms during homoepitaxial growth of silicon

van Wingerden, J

Growth mechanisms during homoepitaxial growth of silicon

Doctoral thesis (1999)

Authors

J van Wingerden Old organisation TN/TechnischeNatuurkunde voorm

Department

Old organisation TN/TechnischeNatuurkunde voorm

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Published Date

1999

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Department

Old organisation TN/TechnischeNatuurkunde voorm