Microstructure characterisation of location-controlled Si-islands crystallised by excimer laser in the µ-Czochralski (grain filter) process

Danciu, D; Ishihara, R.; Tichelaar, F.D.; Hiroshima, Y; Inoue, S; Shimoda, T; Metselaar, JW; Beenakker, C.I.M.

Microstructure characterisation of location-controlled Si-islands crystallised by excimer laser in the µ-Czochralski (grain filter) process

Conference paper (2004)

Authors

D Danciu Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

F.D. Tichelaar

Y Hiroshima External organisation

S Inoue External organisation

T Shimoda External organisation

JW Metselaar Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2004

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials