Towards automatic alignment of a crystalline sample in an electron microscope along a zone axis

Jansen, J.; Otten, MT; Zandbergen, H.W.

Towards automatic alignment of a crystalline sample in an electron microscope along a zone axis

Journal article (2013)

Authors

J. Jansen QN/High Resolution Electron Microscopy

MT Otten External organisation

H.W. Zandbergen QN/High Resolution Electron Microscopy

Research Group

QN/High Resolution Electron Microscopy

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Published Date

2013

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Research Group

QN/High Resolution Electron Microscopy

Abstract

A method is presented to use an electron microscope in transmission mode to determine the mis-tilt from a zone axis of a crystalline material. The method involves recording a number of additional diffractiion patterns with incident beams tilted over 2 to 3 degrees. It is shown that an accuracy of 0.02 degree can be achieved, which is far better than that of the specimen-stage tilt axes, which is about 0.1 degree for the beta-tilt.