Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage

Dijkstra, BG; Bosgra, O.H.

Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage

Conference paper (2002)

Authors

BG Dijkstra DISC

O.H. Bosgra DISC

Research Group

DISC

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Published Date

2002

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Research Group

DISC

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