Numerical gas flow and heat transfer simulation in the ASM Epsilon 2000 CVD reactor for Pure Boron deposition

Journal article (2014)

Authors

V. Mohammadi Electronic Components, Technology and Materials
Saeide Mohammadi External organisation
S Ramesh External organisation
Stoyan Nihtianov Electronic Instrumentation
Research Group
Electronic Components, Technology and Materials
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Published Date

2014

Language

English

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Research Group

Electronic Components, Technology and Materials