Study of the Self-resonance Frequency of a Flat Coil for an Eddy-Current Position Sensor

Conference paper (2016)

Authors

J.G. Vogel Electronic Instrumentation -

S. Nihtianova Electronic Instrumentation -

Research Group

Electronic Instrumentation () (TU Delft)

Modelling Eddy-current sensor Self-resonance frequency Archimedean coil Position sensor

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Published Date

2016

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

At present, a novel eddy-current position sensor is being developed with an aim to attain sub-nanometre resolution. The sensor contains a flat Archimedean coil that should have a high enough Self-Resonance Frequency (SRF). This paper studies the SRF of coils with various geometries. The SRFs increase in the vicinity of a conductive target, but are relatively constant at small standoff distances. For accurate results, a 3D finite element model must be used instead of a 2D model. Based on the finite element results, a relatively simple expression has been obtained that predicts the SRF for standoffs between 10 pm and 100 pm with a RMS deviation below 6 %.