Texture-related roughness of (Nb, Ti)N sputter-deposited films

Iossad, N; van der Pers, N.M.; Grachev, S; Zuiddam, M.R.; Jackson, BD; Dmitriev, PN; Klapwijk, T.M.

Texture-related roughness of (Nb, Ti)N sputter-deposited films

Journal article (2003)

Authors

N Iossad QN/Fysics of NanoElectronics

N.M. van der Pers OLD Virtual Materials and Mechanics

S Grachev OLD Virtual Materials and Mechanics

M.R. Zuiddam QN/Kavli Nanolab Delft -

BD Jackson QN/Fysics of NanoElectronics

PN Dmitriev External organisation

T.M. Klapwijk QN/Fysics of NanoElectronics

Research Group

QN/Fysics of NanoElectronics

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Published Date

2003

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Research Group

QN/Fysics of NanoElectronics