Actuator for contactless transport and positioning of large flat substrates

Wesselingh, J.; Van Ostayen, Ron A.J.; Spronck, Jo; Munnig Schmidt, Robert; van Eijk, J

Actuator for contactless transport and positioning of large flat substrates

Conference paper (2008)

Authors

J. Wesselingh Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Ron A.J. Van Ostayen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Jo Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Robert Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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http://resolver.tudelft.nl/uuid:87bf4fb1-b26d-4c20-996a-e570b6effd6b

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Published Date

2008

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design