Location-control of large grains by ¿-czochralski (grain filter) process and its application to single-crystalline silicon thin-film transistors

Ishihara, R; van der Wilt, PC; van Dijk, BD; Metselaar, JW; Beenakker, C.I.M.

Location-control of large grains by ¿-czochralski (grain filter) process and its application to single-crystalline silicon thin-film transistors

Conference paper (2002)

Authors

R Ishihara Electronic Components, Technology and Materials

PC van der Wilt Electronic Components, Technology and Materials

BD van Dijk Electronic Components, Technology and Materials

JW Metselaar Electronic Components, Technology and Materials

C.I.M. Beenakker Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

To reference this document use:

http://resolver.tudelft.nl/uuid:81ff1c36-80b8-48ef-8a47-f50312d3bce8

More Info

expand_more

Published Date

2002

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Components, Technology and Materials

No files available

Metadata only record. There are no files for this conference paper.