Relative optical wavefront measurement in displacement measuring interferometer systems with sub-nm precision

Journal article (2013)

Authors

A.J.H. Meskers Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
D Voigt External organisation
J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2013

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design