Development of sub-micron broadband lens-coupled LEKIDs for sub-mm astronomy

Journal article (2016)

Authors

Alicia Gomez Centro de Astrobiología (INTA-CSIC)

P. Prieto Centro de Astrobiología (INTA-CSIC)

J.J.A. Baselmans SRON–Netherlands Institute for Space Research

J Bueno SRON–Netherlands Institute for Space Research

S Doyle Cardiff University

P Barry Cardiff University

A Bideaud Cardiff University

Nuria Llombart Tera-Hertz Sensing -

D. Granados Instituto Madrilenõ de Estudios Avanzados en Nanociencia (IMDEA-Nanociencia)

J. L. Costa-Kramer Instituto de Microelectronica de Madrid (CSIC)

J Martin-Pintado Centro de Astrobiología (INTA-CSIC)

Research Group

Tera-Hertz Sensing () (TU Delft)

Nanofabrication Kinetic inductance detector Lumped element

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Published Date

2016

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Tera-Hertz Sensing

Abstract

We present a fabrication method for sub-micron lens-coupled lumped element kinetic inductance detectors (LEKIDs) for broadband sub-millimeter (sub-mm) and THz radiation detection. The LEKIDs are fabricated from very thin (12 nm) and narrow (200 nm) aluminum lines to match the impedance of the LEKID to the substrate impedance. The fabrication process is based on a combination of maskless laserwriter lithography and electron beam lithography, providing low (few microns) and high resolution (down to 200 nm) over large areas in a single process. Preliminary optical characterization shows that the fabricated LEKIDs are sensitive to 1.5 THz radiation.