Optimizing chemical mechanical polishing process in 3D-IC

Derakhshandeh Kheljani, J.; Tajari Mofrad, M.R.; Ishihara, R; Beenakker, C.I.M.; van der Cingel, J.

Optimizing chemical mechanical polishing process in 3D-IC

Conference paper (2008)

Authors

J. Derakhshandeh Kheljani Electronic Components, Technology and Materials

M.R. Tajari Mofrad Electronic Components, Technology and Materials

R Ishihara Electronic Components, Technology and Materials

C.I.M. Beenakker Electronic Components, Technology and Materials

J. van der Cingel Old - EWI Sect. ECTM

Research Group

Electronic Components, Technology and Materials

Conference contrib. non-refer.

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Published Date

2008

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Research Group

Electronic Components, Technology and Materials

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