Backside illuminated CMOS image sensors for extreme ultraviolet applications

Conference paper (2014)

Authors

Padmakumar R. Ramachandra Rao Electronic Instrumentation - EEMCS
C Laubis External organisation
Stoyan Nihtianov Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation