Evaluation of al-doped SPE ultrashallow P+N junctions for use as PNP SiGe HBT emitters

Conference paper (2008)

Authors

Y Civale Old - EWI Sect. ECTM
G. Lorito Old - EWI Sect. ECTM
Chengcheng Xu External organisation
L.K. Nanver Electronic Components, Technology and Materials
R. van der Toorn Old - EWI Sect. ECTM
Research Group
Old - EWI Sect. ECTM
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM

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