Fabrication and numerical analysis of nanoscale silicon pillars for IC applications

Conference paper (2005)

Authors

Y Civale Electronic Components, Technology and Materials
P Hadley QN/Mol. Electronics & Devices
L.K. Nanver Electronic Components, Technology and Materials
E.J.G. Goudena Old - EWI Sect. ECTM
JHCM Slabbekoorn Electronic Components, Technology and Materials
Research Group
Electronic Components, Technology and Materials
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Published Date

2005

Language

Undefined/Unknown

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Research Group

Electronic Components, Technology and Materials

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