Fabrication and numerical analysis of nanoscale silicon pillars for IC applications

Civale, Y; Hadley, P; Nanver, L.K.; Goudena, E.J.G.; Slabbekoorn, JHCM

Fabrication and numerical analysis of nanoscale silicon pillars for IC applications

Conference paper (2005)

Authors

Y Civale Electronic Components, Technology and Materials -

P Hadley QN/Mol. Electronics & Devices

L.K. Nanver Electronic Components, Technology and Materials -

E.J.G. Goudena Old - EWI Sect. ECTM

JHCM Slabbekoorn Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2005

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials