Formation of nanopores in a SiN/SiO2 membrane with an electron beam

Wu, M.; Krapf, D; Zandbergen, M.; Zandbergen, Henny; Batson, PE

Formation of nanopores in a SiN/SiO2 membrane with an electron beam

Journal article (2005)

Authors

M. Wu

D Krapf Old organisation QN/Moleculaire Biofysica

M. Zandbergen External organisation

Henny Zandbergen

PE Batson External organisation

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Published Date

2005

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