Defect-selective etching of SiC

Weyher, JL; Lazar, S; Borysiuk, J; Pernot, J

Defect-selective etching of SiC

Journal article (2005)

Authors

JL Weyher External organisation

S Lazar

J Borysiuk External organisation

J Pernot External organisation

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Published Date

2005

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