Control-relevant identification and robust motion control of a wafer stage

Book chapter (2002)

Authors

RA de Callafon External organisation
Paul van den Hof Old - sect Systems, Signals and control Group (IST/MMR)
Research Group
Old - sect Systems, Signals and control Group (IST/MMR)
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Published Date

2002

Language

Undefined/Unknown

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Research Group

Old - sect Systems, Signals and control Group (IST/MMR)