Development and applications of novel optoelectromechanical system micro-machined in silicon

Report (2000)

Authors

G Vdovin External organisation
P.J. French Electronic Instrumentation - EEMCS
J.H. Huijsing Electronic Instrumentation - EEMCS
M Loktev Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2000

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation