High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics

Journal article (2009)

Authors

T. Zoumpoulidis Electronic Components, Technology and Materials -

M. Bartek Electronic Components, Technology and Materials -

P de Graaf External organisation

R. Dekker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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http://resolver.tudelft.nl/uuid:6de3beb0-8ad9-4b07-9f50-8a36ac34fc67

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Published Date

2009

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials