XY360 - Planar positioning stage with a PSD sensor and ferrofluid bearings

Lampaert, Stefan; Habib, H.; Van Ostayen, Ron; Spronck, J. W.

XY360 - Planar positioning stage with a PSD sensor and ferrofluid bearings

Conference paper (2016)

Authors

Stefan Lampaert Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

H. Habib

Ron Van Ostayen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2016

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

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