Global dynamics and integrity of a micro-plate pressure sensor

Journal article (2019)

Authors

P. Belardinelli Università Politecnica delle Marche, Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
B. Sajadi Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Stefano Lenci Università Politecnica delle Marche
F. Alijani Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2019

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

This paper investigates the complex bifurcation scenario of electrically-actuated circular micro-plates subjected to differential pressure. Our analysis deals with the primary, secondary and ultimate saddle-node bifurcation points responsible for the device snap-through and addresses the pressure range in which the robustness of the two main stable configurations is undermined by minor coexisting attractors. By making use of basins of attraction and integrity profiles, safe dynamical regions of motion are evaluated with respect to the applied DC voltage. It is found that period-doubling bifurcations are accountable for a sensible reduction in the dynamical integrity, small variations of the DC voltage largely modify the response of the pressure sensor.

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