Towards STEM control: Modeling framework and development of a sensor for defocus control

Conference paper (2009)

Authors

A. Tejada Ruiz DISC - Mechanical, Maritime and Materials Engineering
W Van den broek External organisation
SW van der Hoeven DISC - Mechanical, Maritime and Materials Engineering
A.J. den Dekker Team Michel Verhaegen - Mechanical, Maritime and Materials Engineering , DISC - Mechanical, Maritime and Materials Engineering
Research Group
DISC (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Research Group

DISC