Material properties and growth process of microcrystalline silicon with growth rates in excess of 1 nm/s

Hamers, EAG; Smets, AHM; Smit, C; Hoefnagels, JPM; Kessels, Wilhelmus M.M.; van de Sanden, MCM

Material properties and growth process of microcrystalline silicon with growth rates in excess of 1 nm/s

Conference paper (2001)

Authors

EAG Hamers External organisation

AHM Smets External organisation

C Smit Electronic Components, Technology and Materials

JPM Hoefnagels External organisation

Wilhelmus M.M. Kessels External organisation

MCM van de Sanden External organisation

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek

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Published Date

2001

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Research Group

Electronic Components, Technology and Materials

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