Mechanical study of silicon nitride layers of thin flexible substrates under bending

Conference paper (2009)

Authors

B.A.Z. Mimoun Electronic Components, Technology and Materials - EEMCS
O Gourhant External organisation
R Dekker Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2009

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials