A single-mask thermal displacement sensor in MEMS

Conference paper (2010)

Authors

RP Hogervorst External organisation
B Krijnen External organisation
DM Brouwer External organisation
JBC Engelen External organisation
U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering