Fast deposition of microcrystalline silicon with an expanding thermal plasma

Smit, C; Hamers, EAG; Korevaar, BA; van Swaaij, R.A.C.M.M.; van de Sanden, MCM

Fast deposition of microcrystalline silicon with an expanding thermal plasma

Journal article (2002)

Authors

C Smit Electronic Components, Technology and Materials -

EAG Hamers External organisation

BA Korevaar Electronic Components, Technology and Materials -

R.A.C.M.M. van Swaaij Electronic Components, Technology and Materials -

MCM van de Sanden External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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http://resolver.tudelft.nl/uuid:5b5b3016-2bc6-4c55-90d2-501ba44cd0af

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Published Date

2002

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials