Concept and demonstration of individual probe actuation in two-dimensional parallel Atomic force microscope system

Journal article (2007)

Authors

T Akiyama External organisation
L Aeschiman External organisation
L Chantada External organisation
NF de Rooij External organisation
U Staufer Micro and Nano Engineering
Research Group
Micro and Nano Engineering
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Published Date

2007

Language

English

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Research Group

Micro and Nano Engineering

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