Property of single-crystalline Si TFTs fabricated with µ-Czochralski (Grain Filter) process

Ishihara, R.; van der Wilt, PC; van Dijk, BD; Metselaar, JW; Beenakker, C.I.M.

Property of single-crystalline Si TFTs fabricated with µ-Czochralski (Grain Filter) process

Conference paper (2003)

Authors

R. Ishihara Electronic Components, Technology and Materials -

PC van der Wilt Electronic Components, Technology and Materials -

BD van Dijk Electronic Components, Technology and Materials -

JW Metselaar Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2003

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials