Property of single-crystalline Si TFTs fabricated with µ-Czochralski (Grain Filter) process

Ishihara, R; van der Wilt, PC; van Dijk, BD; Metselaar, JW; Beenakker, C.I.M.

Property of single-crystalline Si TFTs fabricated with µ-Czochralski (Grain Filter) process

Conference paper (2003)

Authors

R Ishihara Electronic Components, Technology and Materials

PC van der Wilt Electronic Components, Technology and Materials

BD van Dijk Electronic Components, Technology and Materials

JW Metselaar Electronic Components, Technology and Materials

C.I.M. Beenakker Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2003

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Research Group

Electronic Components, Technology and Materials

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